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Comparison of Soi Technologies

Published online by Cambridge University Press:  22 February 2011

Hon Wai Lam
Hon Wai Lam*
Affiliation:
Texas Instruments Incorporated MS 944, P. O. Box 225621 Dallas, Texas 75265
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Abstract

Silicon-on-Insulator (SOI) technologies are becoming more important as CMOS becomes the preferred technology for VLSI. The progress of the three most actively researched SOI technologies, beam-recrystallized SOI, implanted buried oxide and Full Isolation by Porous Oxidized Silicon will be summarized in this paper.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 579
Copyright
Copyright © Materials Research Society 1984

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References

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