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Ductility Enhancement and Mechanical Properties of Ibad Ceramic thin films

Published online by Cambridge University Press:  26 February 2011

J. K. Hirvonen ,
T. G. Tetreault ,
G. Parker  and
C. J. McHargue
J. K. Hirvonen
Affiliation:
Spire Corporation, Bedford, MA 01730
T. G. Tetreault
Affiliation:
Spire Corporation, Bedford, MA 01730
G. Parker
Affiliation:
Spire Corporation, Bedford, MA 01730
C. J. McHargue
Affiliation:
ORNL, Oak Ridge, TN 37831
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Abstract

Thin ceramic films (A12O3 ZrO2, Si3N4, and BN) have been prepared by ion beam assisted deposition (IBAD) and their mechanical properties examined. The films exhibit extreme ductility and adhesion, with the former property possibly attributed to the very fine grained, quasi-amorphous grain structure noted for low temperature IBAD coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 201
Copyright
Copyright © Materials Research Society 1991

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References

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