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The Effects of Gas Composition and Pressure on RF Plasma Sintering of MgO

Published online by Cambridge University Press:  25 February 2011

Peter C. Kong ,
Y. C. Lau  and
E. Pfender
Peter C. Kong
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Mennesota, U.S.A.
Y. C. Lau
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Mennesota, U.S.A.
E. Pfender
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Mennesota, U.S.A.
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Abstract

Rapid densification of MgO in an rf plasma without sintering aids is demonstrated. The sintered densities of MgO are sensitive to the plasma composition and gas pressure. In general, specimens are sintered to higher densities in Ar/O2 and Ar/H2O plasmas than in pure Ar plasmas. This may be explained by the effects of plasma enthalpy and surface recombination of charged particles and of atomic species. Analyses show that the evolution of the microstructures of the sintered specimens remains similar, regardless of the plasma conditions. No substantial grain growth is observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 371
Copyright
Copyright © Materials Research Society 1987

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References

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