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Elastic Constants and Graphitic Grain Boundaries of Nanocrystalline CVD-Diamond Thin Films: Resonant Ultrasound Spectroscopy and Micromechanics Calculation

Published online by Cambridge University Press:  01 February 2011

Hirotsugu Ogi ,
Nobutomo Nakamura ,
Hiroshi Tanei ,
Ryuji Ikeda ,
Masahiko Hirao  and
Mikio Takemoto
Hirotsugu Ogi
Affiliation:
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
Nobutomo Nakamura
Affiliation:
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
Hiroshi Tanei
Affiliation:
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
Ryuji Ikeda
Affiliation:
Asahi Diamond Ind Co Ltd, Res & Dev, Chiba 290-0515, Japan Faculty of Science and Engineering, Aoyama Gakuin University, Kanagawa 229-8558, Japan
Masahiko Hirao
Affiliation:
Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531, Japan
Mikio Takemoto
Affiliation:
Faculty of Science and Engineering, Aoyama Gakuin University, Kanagawa 229-8558, Japan
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Abstract

Using resonant-ultrasound spectroscopy coupled with laser-Doppler interferometry, we determine the independent elastic constants of nanocrystalline CVD-diamond thin films with thickness between 2-12 μm. They are deposited on oriented monocrystal silicon substrates by the hot-filament methane/nitrogen CVD method. The diagonal components of the elastic constants are smaller than those of microcrystalline CVD diamond films and bulk diamond. However, the off-diagonal component is larger. We attribute these observations to the presence of sp2-bonded graphitic phase at grain boundaries. A micromechanics model assuming inclusions of thin graphitic plates consistently explains the observations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O1.2
Copyright
Copyright © Materials Research Society 2005

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