Hostname: page-component-848d4c4894-ttngx Total loading time: 0 Render date: 2024-05-15T13:19:01.358Z Has data issue: false hasContentIssue false
  • English
  • Français

Epitaxial ZnO Piezoelectric Films for RF Filters

Published online by Cambridge University Press:  10 February 2011

Nuri W. Emanetoglu ,
Yicheng Lu ,
Chandrasekhar Gorla ,
Ying Liu ,
Shaohua Liang  and
William Mayo
Nuri W. Emanetoglu
Affiliation:
ECE Department, Rutgers University, Piscataway, NJ 08855–0909, ylu@ece.rutgers.edu
Yicheng Lu
Affiliation:
ECE Department, Rutgers University, Piscataway, NJ 08855–0909, ylu@ece.rutgers.edu
Chandrasekhar Gorla
Affiliation:
Ceramics Department, Rutgers University, Piscataway, NJ 08855–0909
Ying Liu
Affiliation:
ECE Department, Rutgers University, Piscataway, NJ 08855–0909, ylu@ece.rutgers.edu
Shaohua Liang
Affiliation:
ECE Department, Rutgers University, Piscataway, NJ 08855–0909, ylu@ece.rutgers.edu
William Mayo
Affiliation:
Ceramics Department, Rutgers University, Piscataway, NJ 08855–0909
Get access

Abstract

ZnO has high piezoelectric coupling coefficient and acoustic velocity; therefore, it is an attractive material candidate for high frequency and low loss filters. Piezoelectric ZnO thin film based RF devices offer the advantages such as low power consumption, circuit miniaturization and cost reduction through integration with main stream MMIC technology. We report CVD growth of epitaxial ZnO thin films on R-sapphire substrates. X-ray diffraction techniques have been used to study the crystallinity and orientation of the films, as well as the epitaxial relationship between the films and the substrate. High-resolution cross-sectional TEM reveals the atomically sharp interface structure. As grown ZnO films exhibit dominant n-type conductivity due to the oxygen vacancies. Excellent piezoelectricity has been achieved through a multi-step Li diffusion under oxygen ambient. Surface Acoustic Wave (SAW) filters with 10-micron wavelength have been fabricated. Low insertion loss and high piezoelectric coupling coefficient have been observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 353
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Hachigo, A., Malocha, D.C., Richie, S.M., “ZnO/ Diamond/Si SAW Filter Properties Including Velocity Dispersion”, Proc. Of the 1995 IEEE Ultrasonics Symposium, pp. 371–374, 1995 Google Scholar
2. Ieki, H., Tanaka, H., Koike, J., Nishikawa, T., “Microwave Low Insertion Loss SAW Filter by Using ZnO/Sapphire Substrate with Ni Dopant”, 1996 IEEE MTT-S Digest, pp. 409–412, 1996 Google Scholar
3. Lau, C.K., Tiku, S.K., Lakin, K.M., “Growth of epitaxial ZnO thin films by organometallic chemical vapor deposition”, J. Electrochem. Soc: Solid-State Sci. & Tech., Vol.127, no.8, pp. 1843–1847, 1980 Google Scholar
4. Koike, J., Tanaka, H., Ieki, H., “Quasi-Microwave band longitudinally coupled surface acoustic wave resonator filters using ZnO/Sapphire substrate”, Jpn. J. Appl. Phys., Vol. 34, pp. 2678–2682, 1995 Google Scholar
5. Mitsuyu, T., Ono, S., Wasa, K., “Structures and SAW properties of rf-sputtered single crystal films of ZnO on sapphire”, J. Appl. Phys., Vol. 51, no. 5, pp. 2464–2470, May 1980 Google Scholar
6. Seabury, C.W., Kobrin, P.H., Addison, R., Havens, D.P., “Thin film ZnO based bulk acoustic mode filters”, 1997 IEEE MTT-S Digest, pp. 181–184 Google Scholar
7. Berger, , “Models for contacts to planar devices”, Solid State Electronics, v. 15, p. 145, 1972 Google Scholar
8. Berger, , “Contact resistance and contact resistivity”, J. Electrochem. Soc, v. 119, n.4, p. 507, 1972 Google Scholar
9. Gorla, C., Liang, S., Emanetoglu, N. W., Mayo, W., Lu, Y., “Microstructural evaluation of ZnO thin films deposited by MOCVD”, Proc. of the MRS 1997 Fall Meeting, to be publishedGoogle Scholar
10. Emanetoglu, N.W., Liang, S., Gorla, C., Lu, Y., Jen, S., Subramanian, R., “Epitaxial Growth and Characterization of High Quality ZnO Films for Surface Acoustic Wave Applications”, Proc. Of the 1997 IEEE Ultrasonics Symposium, to be published.Google Scholar
11. Mandel, G., “Self-compensation limited conductivity in binary semiconductors. I. Theory”, Physical Review, v. 134, no.4A, pp. A1073–A1079, May 1964 Google Scholar
12. Mandel, G., Morehead, F.F., Wagner, P.R., “Self-compensation limited conductivity in binary semiconductors. III.Expected correlations with fundamental parameters”, Physical Review, Vol. 136, no.4A, pp. A826–A832, Nov. 1964 Google Scholar
13. Ruile, W., Meier, H., “Determination of Eleastic Constants of Thin Films for Improved CAD Modeling of SAW Filters and Resonators”, Proc. Of the 1992 IEEE Ultrasonics Symposium, pp. 437–440, 1992 Google Scholar
14. Adler, E.L., “Matrix Methods Applied to Acoustic Waves in Multilayers”, IEEE Trans. On Ultrasonics, Ferroelectrics and Frequency Control, v. 37, no.6, pp. 485–490, Nov. 1990 Google Scholar