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Evaluating the Mechanical Properties of MEMS by Combining the Resonance Frequency and Microtensile Methods

Published online by Cambridge University Press:  01 February 2011

Dongil Son ,
Jong-jin Kim ,
Dong Won Kim ,
Tae Won Lim  and
Dongil Kwon
Dongil Son
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–742, Korea
Jong-jin Kim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–742, Korea
Dong Won Kim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–742, Korea
Tae Won Lim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–742, Korea
Dongil Kwon
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–742, Korea
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Abstract

Tensile, fracture and fatigue properties of single- and polycrystalline silicon and LIGA-Ni were evaluated by the resonance frequency and microtensile methods. A new method for evaluating the fracture toughness that combines these two methods was proposed. A pre-crack was generated in an electrostatically driven test specimen and a load was applied by piezoelectrically driven microtensile equipment. Before the microtensile test, a new surface micromachining technique including a two-step sacrificial layer removal was used. The pre-cracked specimen was attached to microtensile equipment by a UV-adhesive glass grip. The fatigue pre-crack was successfully introduced and the fracture toughness could be derived on the basis of fracture mechanics. The fracture toughness of the pre-cracked specimen was relatively low compared with that of the notched specimen, so that we were able to determine the effect of the notch tip radius. The fatigue properties of LIGA-Ni film were also evaluated. A tensile-tensile fatigue load was applied by a piezoelectric actuator, and real-time load-displacement curves were displayed via computer. The dependence of S-N curves, crack propagation rates and fatigue-notch factor on the applied load for 10 μm Ni film was analyzed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 782: Symposium A – Micro- and Nanosystems , 2003 , A10.6
Copyright
Copyright © Materials Research Society 2004

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References

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