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Evolution of Surface Roughness of a Strained Epitaxial Film Due to Interface Misfit Dislocations

Published online by Cambridge University Press:  15 February 2011

F. Jonsdottir  and
L. B. Freund
F. Jonsdottir
Affiliation:
Division of Engineering, Brown University, Providence, RI 02912
L. B. Freund
Affiliation:
Division of Engineering, Brown University, Providence, RI 02912
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Abstract

The appearance of misfit dislocations at the interface between a strained layer and its substrate induces a nonuniform chemical potential along the surface of the layer. Under the assumption that the resulting chemical potential gradient will drive coherent mass rearrangement by surface diffusion, a model of evolution of surface shape is considered which leads to estimates of the surface roughness induced by this mechanism.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 309
Copyright
Copyright © Materials Research Society 1994

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References

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