Hostname: page-component-848d4c4894-wg55d Total loading time: 0 Render date: 2024-05-05T06:20:09.641Z Has data issue: false hasContentIssue false
  • English
  • Français

Exafs Studies of Cobalt Silicide Formation Produced by High Dose Ion Implantation

Published online by Cambridge University Press:  21 February 2011

Z. Tan ,
J. I. Budnick ,
F. Sanchez ,
G. Tourillon ,
F. Namavar ,
H. Hayden  and
A. F. Fasihuddin
Z. Tan
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
J. I. Budnick
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
F. Sanchez
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
G. Tourillon
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
F. Namavar
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
H. Hayden
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
A. F. Fasihuddin
Affiliation:
University of Connecticut, Dept. of Physics and Institute of Materials Science, Storrs, CT 06268.
Get access

Abstract

The early stages of cobalt silicide formation in high dose (1.0 to 8.0× 1017Co/cm2) cobalt implanted Si(100) are studied by extended X-ray absorption fine structure (EXAFS), X-ray diffraction (XRD) and Rutherford backscattering spectroscopy (RBS). Locally ordered silicide that is not detectable in XRD has been observed with EXAFS in the as-implanted samples. Long-range ordered phases are observed in the 3 × 1017Co/cm2 samples. After thermal annealing at 700–750°C, single phase CoSi2 with (400) orientation is formed in all implants.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 143: Symposium V – Synchrotron Radiation in Materials Research , 1988 , 145
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Sanchez, F. H., Namavar, F., Budnick, J. I., Fasihuddin, A. H., and Hayden, H. C., Mater. Res. Soc. Symp. Proc. 27, 341 (1986).Google Scholar
2. Namavar, F., Sanchez, F. H., Budnick, J. I., Fasihuddin, A. H., and Hayden, H. C., Mater. Res. Soc. Symp. Proc. 74, 487 (1987).CrossRefGoogle Scholar
3. White, A. E., Short, K. T., Dynes, R. C., Garno, J. P., and Gibson, J. M., Appl. Phys. Lett. 50(2), 95 (1987).CrossRefGoogle Scholar
4. Lindner, J. K. N. and Kaat, E. H. te, prepint, 1988.Google Scholar
5. Namavar, F., Budnick, J. I., Sanchez, F. H., and Otter, F., Nucl. Instrum. Meth. B7/8, 357 (1985).Google Scholar
6. Tourillon, G., Dartyge, E., Fontaine, A., Lemonnier, M., and Bartol, F., Phys. Lett. A 121, 251 (1987).Google Scholar
7. Namavar, F., unpublished, (SPIRE Company, 1988).Google Scholar
8. Stern, E. A. and Heald, S. M. in Handbook of Synchrotron Radiation, editor Koch, E. E., Vol. 1, P.955, North-Holland, Amsterdam, 1983.Google Scholar
9. Stern, E. A., Sayers, D. E. and Lytle, F. W., Phys. Rev. B 11, 4836 (1975).CrossRefGoogle Scholar