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GaN: From Selective Area to Epitaxial Lateral Overgrowth

Published online by Cambridge University Press:  15 February 2011

X. Li
Affiliation:
University of Illinois, Urbana, IL 61801
S. G. Bishop
Affiliation:
University of Illinois, Urbana, IL 61801
J. J. Coleman
Affiliation:
University of Illinois, Urbana, IL 61801
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Abstract

The evolution of the topography of GaN stripes as a function of stripe width (2 - 120 μm), fill factor and substrate smoothness has been explored. The spatially resolved optical properties of these structures have been characterized by cathodoluminescence imaging and line scans. Implications from the optical study have been discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

1 Nakamura, S., Senoh, M., Nagahama, S. et al. Appl. Phys. Lett. 72, 211 (1998).Google Scholar
2 Nishinaga, T., Nakano, T. and Zhang, S., Jpn. J. Appl. Phys. 27, L964 (1988).Google Scholar
3 Naritsuka, S. and Nishinaga, T., J. Cryst. Growth 174, 622 (1997).Google Scholar
4 Tanaka, T., Uchida, K., Watanabe, A., and Minagawa, S., Appl. Phys. Lett. 68, 976 (1996).Google Scholar
5 Akasaka, T., Kobayashi, Y., Ando, S., and Kabayashi, N., Appl. Phys. Lett. 71, 2196 (1997).Google Scholar
6 Kapolnek, D., Keller, S., Vetury, R., Underwood, R. D., Kozodoy, P., Baars, S. P. Den, and Mishra, U. K., Appl. Phys. Lett. 71, 1204 (1997).Google Scholar
7 Nam, O., Bremser, M. D., Zheleva, T. S., and Davis, R. F., Appl. Phys. Lett. 71, 2472 (1997) and T. S. Zheleva, O. Nam, M. D. Bremser, and R. F. Davis, Appl. Phys. Lett. 71, 2638 (1997).Google Scholar
8 Kato, Y., Kitamura, S., Hiramatsu, K., Sawaki, N., J. Cryst. Growth 144, 133 (1994).Google Scholar
9 Usui, A., Sunakawa, H., Sakai, A. and Yamaguchi, A. A., Jpn. J. Appl. Phys. 36, L899 (1997).Google Scholar
10 Li, X., Jones, A. M., Roh, S. D., Turnbull, D. A., Bishop, S. G., and Coleman, J. J., J. Electron. Mater. 26, 306 (1997). X. Li, A. M. Jones, S. D. Roh, D. A. Turnbull, E. E. Reuter, S. Q. Gu, S. G. Bishop, and J. J. Coleman, Mater. Res. Soc. Sym. Proc. 395, 943 (1996).Google Scholar
11 Li, X., Bishop, S. G. and Coleman, J. J., Appl. Phys. Lett. 73, 1179 (1998).Google Scholar
12 Li, X. and Coleman, J. J., Appl. Phys. Lett. 70, 438 (1997).Google Scholar
13 Park, J., Grudowski, P. A., Eiting, C. J., and Dupuis, R. D., Appl. Phys. Lett. 73(3), 333 (1998).Google Scholar
14 Nam, O., Zheleva, T. S., Bremser, M. D., and Davis, R. F., J. Electron. Mater. 27, 233 (1998).Google Scholar
15 Marchand, H., preprints.Google Scholar
16 Rosner, S. J., Carr, E. C., Ludowise, M. J., Girolami, G., Erikson, H. I., Appl. Phys. Lett. 70, 420 (1997).Google Scholar
17 Ponce, F. A., Bour, D. P., Gotz, W., Wright, P. J., Appl. Phys. Lett. 68, 57 (1996).Google Scholar
18 Freitas, J. A. Jr, Nam, O., Davis, R. F., Saparin, G. V., and Obyden, S. K., Appl. Phys. Lett. 72, 2990 (1998).Google Scholar
19 Yu, Z., Johnson, M.A.L., Mcnulty, T., Brown, J.D., Cook, J.W. Jr, Schetzina, J.F., MRS Internet J. Nitride Semicond Res. 3, 6(1998).Google Scholar