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Halogenation of Diamond (100) Using Atomic Beams

Published online by Cambridge University Press:  25 February 2011

Andrew Freedman  and
Charter D. Stinespring
Andrew Freedman
Affiliation:
Center for Chemical and Environmental Physics Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
Charter D. Stinespring
Affiliation:
Center for Chemical and Environmental Physics Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
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Abstract

Diamond (100) substrates have been halogenated under ultrahigh vacuum conditions using atomic beams of chlorine and fluorine. X-ray photoelectron spectra of the resulting samples indicate that saturation levels of less than a monolayer occur for both species. The fluoride adlayer is stable up to 700 K and slowly desorbs at temperatures above this temperature. In contrast, the chlorine adlayer starts to desorb above 223 K, the lowest temperature sampled.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 571
Copyright
Copyright © Materials Research Society 1991

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References

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