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Hybrid Micro-Optical Sensors via Sol-Gel Soft Lithography

Published online by Cambridge University Press:  01 February 2011

Mark A. Clarner  and
Michael J. Lochhead
Mark A. Clarner
Affiliation:
Department of Chemical Engineering, University of New Hampshire, Durham, NH 03824, U.S.A.
Michael J. Lochhead
Affiliation:
Department of Chemical Engineering, University of New Hampshire, Durham, NH 03824, U.S.A.
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Abstract

Organically modified silica gels and dye-doped silica gels have been patterned into micrometer-scale structures on a substrate using micro molding in capillaries (MIMIC). This approach is from a class of elastomeric stamping and molding techniques collectively known as soft lithography. Soft lithography and sol-gel processing share attractive features in that they are relatively benign processes performed at ambient conditions, which makes both techniques compatible with a wide variety of organic molecules, molecular assemblies, and biomolecules. The combination of sol-gel and soft lithography, therefore, holds enormous promise as a tool for microfabrication of materials with optical, chemical, or biological functionality that are not readily patterned with conventional methods. This paper describes our investigation of micro-patterned organic-inorganic hybrid materials containing indicator dyes for microfluidic sensor applications. Reversible colorimetric pH sensing via entrapped reagents is demonstrated in a prototype microfluidic sensor element. Patterned structures range from one to tens of micrometers in cross-section and are up to centimeters in length. Fundamental chemical processing issues associated with mold filling, cracking and sensor stability are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 628: Symposium CC – Hybrid Organic/Inorganic Materials , 2000 , CC9.3
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1. Freemantle, M., Chem. Eng. News,, 77, 27–36 (1999).Google Scholar
2. Kovacs, G. T. A., Petersen, K. and Albin, M., Anal. Chem.,, 68, 407A–412A (1996).Google Scholar
3. MacCraith, B. D., McDonagh, C., McEvoy, A. K., Butler, T., O'Keeffe, G. and Murphy, V., J. Sol-Gel Sci. Tech.,, 8, 1053–1061 (1997).Google Scholar
4. Dave, B. C., Dunn, B., Valentine, J. S. and Zink, J. I., Anal. Chem.,, 66, 1120A–1127A (1994).Google Scholar
5. Lev, O., Tsionsky, M., Rabinovich, L., Glezer, V., Sampath, S., Pankratov, I. and Gun, J., Anal. Chem.,, 67, 22A-30A (1995).Google Scholar
6. Butler, T. M., MacCraith, B. D. and McDonagh, C., J. Non-Cryst. Solids, 224, 249–258 (1998).Google Scholar
7. Kim, E., Xia, Y. and Whitesides, G. M., Nature,, 376, 581–584 (1995).Google Scholar
8. Kim, E., Xia, Y. and Whitesides, G. M., J. Am. Chem. Soc.,, 118, 5722–5731 (1996).Google Scholar
9. Xia, Y. and Whitesides, G. M., Angew. Chem. Int. Ed.,, 37, 550–575 (1998).Google Scholar
10. Lochhead, M. J. and Yager, P. in Materials for Mechanical and Optical Microsystems; edited by Reed, M. L., Elwenspoeck, M., Johansson, S., Obermeier, E., Fujita, H. and Uenishi, Y. (Mater. Res. Soc. Proc. 444, Pittsburgh, PA, 1997) pp. 105–110.Google Scholar
11. Lochhead, M. J. and Yager, P. in Sol-Gel Optics IV edited by Dunn, B. S., Mackenzie, J. D., Pope, E. J. A., Schmidt, H. K. and Yamane, M., M, . (SPIE Proc. 3136, Bellingham, WA, 1997) pp. 261–266.Google Scholar
12. Trau, M., Yao, N., Kim, E., Xia, Y., Whitesides, G. M. and Aksay, I. A., Nature,, 390, 674–676 (1997).Google Scholar
13. Yang, P., Deng, T., Zhao, D., Feng, P., Pine, D., Chmelka, B. F., Whitesides, G. M. and Stucky, G. D., Science,, 282, 2244–2246 (1998).Google Scholar
14. Marzolin, C., Smith, S. P., Prentiss, M. and Whitesides, G. M., Adv. Mat.,, 10, 571–574 (1998).Google Scholar
15. Yang, P., Wirnsberger, G., Huang, H. C., Cordero, S. R., McGhee, M. D., Scott, B., Deng, T., Whitesides, G. M., Chmelka, B. F., Buratto, S. K. and Stucky, G. D., Science,, 287, 465–467 (2000).Google Scholar
16. Motakef, S., Boulton, J. M., Roncone, R. L., Neilson, G., Teowee, G. and Uhlmann, D. R., Appl. Opt.,, 34, 721–728 (1995).Google Scholar
17. Qin, D., Xia, Y. and Whitesides, G. M., Adv. Mat.,, 8, 917–919 (1996).Google Scholar
18. Duffy, D. C., McDonald, J. C., Schueller, O. J. A. and Whitesides, G. M., Anal. Chem.,, 70, 4974–4984 (1998).Google Scholar
19. Nivens, D. A., Zhang, Y. and Angel, S. M., Anal. Chim. Acta,, 376, 235–245 (1998).Google Scholar