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Hydrogen Passivation and Reactivation of Bistable Thermal Donors in Silicon

Published online by Cambridge University Press:  03 September 2012

D. I. Bohne ,
P. Deak  and
J. Weber
D. I. Bohne
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1, D-7000 Stuttgart, Federal Republic of, Germany
P. Deak
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1, D-7000 Stuttgart, Federal Republic of, Germany
J. Weber
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1, D-7000 Stuttgart, Federal Republic of, Germany
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Abstract

The dissociation of Thermal Donor-hydrogen complexes is studied by infra-red absorption, CV and DLTS profiling. Silicon samples are prepared to contain only TD1 and TD2 and in particular only TD1 is exhibiting bistable properties. After hydrogen passivation, annealing in the dark under reverse bias leads to a first order reactivation of TD1 and TD2. A marked difference in the dissociation energies is found (ED(TD1 - H) = 1.67eV, ED (TD2 - H)≈ 1.9eV). Our results suggest that TD1 and TD2 have a different microscopic structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 262: Symposium E – Defect Engineering in Semiconductor Growth, Processing and Device Technology , 1992 , 395
Copyright
Copyright © Materials Research Society 1992

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References

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