Hostname: page-component-848d4c4894-nr4z6 Total loading time: 0 Render date: 2024-06-06T17:15:13.362Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

Published online by Cambridge University Press:  21 February 2011

Costas G. Fountzoulas
Costas G. Fountzoulas*
Affiliation:
U. S. Army Research Laboratory, Materials Directorate, APG, MD 21005-5069, cfount@arl.mil
Get access

Abstract

Hard, low-friction silicon-containing diamond-like carbon coatings (Si-DLC), were formed by Ar+ ion beam assisted deposition (IBAD), on 5 in. diameter silicon wafers. The diffusion pump oil precursor (tetraphenyl-tetramethyl-trisiloxane: (C6H5)4(CH3)4Si3O2) was evaporated through seven, 3 mm diameter, closely packed apertures (multinozzle/multi-aperture container) arranged in a hexagonal pattern, approximately 5 mm apart according to mathematical model [1[ developed at ARL describing the spatial distribution of film deposition from nozzles and apertures onto inclined substrates.The ion energy was kept at 40 keV whereas the ion current density and the oil evaporation temperature were varied to produce hard, lubricious and adherent films. The multinozzle array allowed the relatively uniform (± 20%) coverage of the entire 5 in. substrate. The thickness and the microhardness of the films were measured along the rectilinear surface coordinates of the substrate area. Depending on the deposition parameters the standard deviation of the coating thicknesses and Knoop micro-hardness varied from 14 to 30 percent respectively over the substrate. This is a significant improvement from the previously used single nozzle set up where the standard deviation of the coating thickness was 50 to 100 percent for 2 in. diameter substrates. The Knoop microhardness and the sliding friction coefficient of these coatings ranged from 10,000 to 20,000 MPa and 0.04 to 0.2 respectively. These values are in agreement with our previously reported single nozzle results [2].

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 569
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Franzen, W., Demaree, J. D., Fountzoulas, C. G., and Hirvonen, J. K. in MRS Symposium Proceedings. FA94.Google Scholar
2 Fountzoulas, C. G., Kattamis, T. Z. and Chen, M. in Beam- Solid Interactions (Mat. Res. Soc. Symp. Proc. 316, Pittsburgh, PA, 1993), pp. 851–856.Google Scholar
3 Oguri, K. and Arai, T., J. Mater. Res,. 7, 1313 (1992)Google Scholar
4 Enke, K., Dimingen, H. and Huebsch, H., Appi. Phys. Lett., 36, 291 (1980).Google Scholar
5 Fountzoulas, C. G., Demaree, J. D., Kosik, W. E., Franzen, W., Croft, W. and Hirvonen, J. K. in Beam- Solid Interactions (Mat. Res. Soc. Symp. Proc. 279, Pittsburgh, PA, 1993), pp. 645–650.Google Scholar
6 Meletis, E. I., Erdemir, A. and Fenske, G. R., Surface and Coatings Techno., 73, pp. 39-45 (1995).Google Scholar