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Laser Ablation Of Solid Ozone

Published online by Cambridge University Press:  10 February 2011

Hidehiko Nonaka ,
Tetsuya Nishiguchi ,
Yoshiki Morikawa ,
Masaharu Miyamoto  and
Shingo Ichimura
Hidehiko Nonaka
Affiliation:
Materials Science Division, Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, lbaraki, 305-8568, Japan
Tetsuya Nishiguchi
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Yoshiki Morikawa
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Masaharu Miyamoto
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Shingo Ichimura
Affiliation:
Frontier Technology Division Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki, 305-8568, Japan
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Abstract

Species ablated from solid ozone by a UV laser were investigated using a time-of-flight method through a quadrupole mass filter. The results show that UV-laser ablation of solid ozone can produce a pulsed ozone beam with a translational energy far above that of room temperature. Highconcentration ozone from an ozone jet generator is solidified on a sapphire substrate attached to a copper block which is cooled to 30 to 60 K on a cryocooler head and the solid ozone is irradiated by pulsed laser light from a KrF laser (248 nm). The ablated species were a mixture of ozone and molecular oxygen as well as atomic oxygen due to photodissociation of ozone. At a substrate temperature of 30 K, the total amount of ablated ozone increases as the laser fluence increases to 13 mJcm−2. Beyond this fluence, enhanced decomposition of ozone occurs. Gaussian fitting of the time-of-flight signals of the ablated ozone reveals an average thermal energy exceeding 1,500 K. The velocity also increases when the laser fluence enters saturation at 2,300 K at 13 mJcm−2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J1.3
Copyright
Copyright © Materials Research Society 2000

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