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Laser Heating of Substrate by Multi-Beam Irradiation

Published online by Cambridge University Press:  25 February 2011

Y. F. Lu
Y. F. Lu*
Affiliation:
Department of Electrical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 0511
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Abstract

A general model is derived for computing the temperature profile induced by multi-beam laser irradiation in a semi-infinite substrate. The model is then applied to calculate 2-beam irradiation induced temperature rise in substrate. From this model, it is possibLe to calculate the temperature profile induced by multi-beam irradiation in substrate. The calculated results show that the double-Gaussian beam has advantages of narrow temperature profile and low heat flow intensity. Flatly-topped temperature profiles can be obtained by converting the Gaussian laser beam.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 705
Copyright
Copyright © Materials Research Society 1993

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