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Low Temperature Deposition of Hard, Amorphous Diamondlike Films by Laser Evaporation

Published online by Cambridge University Press:  25 February 2011

J. Krishnaswamy ,
A. Rengan ,
A. Srivatsa ,
J. Narayan ,
Y. Cong ,
R. Collins  and
K. Vedam
J. Krishnaswamy
Affiliation:
Materials Science and Engg., North Carolina State University, Raleigh, N.C.- 27695
A. Rengan
Affiliation:
Materials Science and Engg., North Carolina State University, Raleigh, N.C.- 27695
A. Srivatsa
Affiliation:
Materials Science and Engg., North Carolina State University, Raleigh, N.C.- 27695
J. Narayan
Affiliation:
Materials Science and Engg., North Carolina State University, Raleigh, N.C.- 27695
Y. Cong
Affiliation:
Materials Research Lab., Pennsylvania State University, University Park, PA-16802
R. Collins
Affiliation:
Materials Research Lab., Pennsylvania State University, University Park, PA-16802
K. Vedam
Affiliation:
Materials Research Lab., Pennsylvania State University, University Park, PA-16802
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Abstract

Substrate temperature during deposition of hard carbon films by short pulse (40 nsec, FWHM) eximer (308 nm) laser ablation (∼1.25 × 108 W/cm2) of solid carbon affects the optical and mechnical properties of deposited films. Films deposited at 25° C are superior to those deposited at 500° C. Deposited films were charaterized by spectroscopic ellipsometry, microhardness, TEM, Raman and FT-IR techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 219
Copyright
Copyright © Materials Research Society 1989

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References

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