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Mechanical Properties of Cu/Ta Multilayers Prepared by Magnetron Sputtering

Published online by Cambridge University Press:  10 February 2011

Tai D. Nguyen  and
Troy W. Barbee Jr.
Tai D. Nguyen
Affiliation:
Chemistry and Materials Science Department, Lawrence Livermore National Laboratory, Livermore, CA 94550.
Troy W. Barbee Jr.
Affiliation:
Chemistry and Materials Science Department, Lawrence Livermore National Laboratory, Livermore, CA 94550.
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Abstract

The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X-ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal β-Ta observed. No observable microstructure changes upon annealing at 300°C were found. An average Vickers micro-hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300° C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties in the multilayers are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 522: Symposium T – Fundamentals of Nanoindentation & Nanotribology , 1998 , 269
Copyright
Copyright © Materials Research Society 1998

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