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Metallization of Semiconducting Diamond: Mo, Mo/Au and Mo/Ni/Au

Published online by Cambridge University Press:  26 February 2011

K. L. Moazed ,
J. R. Zeidler  and
M. J. Taylor
K. L. Moazed
Affiliation:
North Carolina State University, Raleigh, NC 27695-7916
J. R. Zeidler
Affiliation:
Code 7601
M. J. Taylor
Affiliation:
Code 561, Naval Ocean Systems Center, San Diego, CA 92152-5000
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Abstract

A processing technology has been developed to make ohmic contacts to naturally doped semiconducting diamond. The approach follows, as far as possible, conventional photolithographic techniques for metallization of semiconductors currently in use in the microelectronics industry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 347
Copyright
Copyright © Materials Research Society 1990

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References

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