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Microstructural characterization of porous thin films

Published online by Cambridge University Press:  11 February 2011

B. Djurfors ,
M.J. Brett  and
D.G. Ivey
B. Djurfors
Affiliation:
nDepartment of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G6.
M.J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2V4.
D.G. Ivey
Affiliation:
nDepartment of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G6.
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Abstract

A preliminary TEM investigation of porous films fabricated by glancing angle deposition has shown the importance of surface diffusion and crystal structure in determining the final microstructure of the film. Although the process variables are extremely important in defining the morphology of the film, their effects are limited in terms of final microstructure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W5.4
Copyright
Copyright © Materials Research Society 2003

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References

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