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Nanosecond Dynamics of Excimer Laser Induced Thermal Decompositon of Thin Polymer Films

Published online by Cambridge University Press:  28 February 2011

X. D. Wu ,
D. Dijkkamp ,
A. S. Gozdz  and
T. Venkatesan
X. D. Wu
Affiliation:
Physics Department, Rutgers University, Piscataway, NJ 08854
D. Dijkkamp
Affiliation:
Bell Communications Research, Inc., Red Bank, NJ 07701
A. S. Gozdz
Affiliation:
Bell Communications Research, Inc., Red Bank, NJ 07701
T. Venkatesan
Affiliation:
Bell Communications Research, Inc., Red Bank, NJ 07701
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Abstract

A novel method to study the effect of rapid heating on polymers is presented. Nanosecond time resolved reflectivity measurements of thermal decomposition of poly(3-butenyltrimethylsilane sulfone) (PBTMSS) and polymethylmetacrylate (PMMA) films spun on silicon wafers and irradiated by a pulsed excimer laser at 248 nm are reported. It was found that there exists a critical temperature for effective decomposition. The time scale for thermal decomposition is comparable with the time scales determined for photo-ablation processes. The results indicate that thermal effects are very important in the interaction between polymers and pulsed UV-lasers.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 74: Symposium A – Beam-Solid Interactions and Transient Processes , 1986 , 275
Copyright
Copyright © Materials Research Society 1987

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