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A New Scanning Thermal Microprobe
Published online by Cambridge University Press: 10 February 2011
Abstract
A thermal microprobe has been designed and built for high resolution temperature sensing. The thermal sensor is a thin-film thermocouple junction at the tip of an Atomic Force Microprobe (AFM) silicon probe needle. Only wafer-stage processing steps are used for the fabrication. The thermal response over the range 25–s 4.5–rovolts per degree C and is linear.
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- Research Article
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- Copyright © Materials Research Society 1998
References
REFERENCES
1.
Nakabeppu, O., Chandrachood, M., Wu, Y., Lal, J., and Majumdar, A., Appl. Phys. Lett., 66
694 (1995).Google Scholar
2.
Pylkki, R. J., Moyer, P.J., and West, P. E., Japan. Journ. Appl. Phys. Part 1, 33
3785 (1994).Google Scholar
3.
Hammiche, A., Pollock, H. M., Song, M., and Hourston, D. J., Meas. Sci. Tech.
7
142 (1996).Google Scholar
6.
Zhang, Yongxia, Zhang, Yanwei, Blaser, Juliana, Sriram, T.S., Enver, Ahsan, Kjoller, Kevin J., and Marcus, R.B., to be published in Rev. Sci. Inst.
Google Scholar
7.
Marcus, R.B., Ravi, T.S., Gmitter, T., Chin, K., Liu, D., Orvis, W.J., Ciarlo, D R., Hunt, C.E. and Trujillo, J., Appl. Phys. Lett.
56 (3), 236 (1990).Google Scholar
9.
Kaye, G.W.C and Laby, T.H., Tables of Physical and Chemical Constants and Some Mathematical Functions (Longman, 1973).Google Scholar
10.
Zhang, Yongxia, Zhang, Yanwei, Sriram, T.S., and Marcus, R.B., Appl. Phys. Lett.
69 (27).Google Scholar