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Non-Contact Real-Time Evaluation of Polyimide Thin Film Thermoelastic Properties Through Impulsive Stimulated Thermal Scattering

Published online by Cambridge University Press:  22 February 2011

J. A. Rogers ,
A. R. Duggal  and
K. A. Nelson
J. A. Rogers
Affiliation:
Chemistry Department, M.I.T., 77 Mass. Ave., Cambridge MA 02139
A. R. Duggal
Affiliation:
GE Research Laboratories, Schenectady N.Y.
K. A. Nelson
Affiliation:
Chemistry Department, M.I.T., 77 Mass. Ave., Cambridge MA 02139
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Abstract

We demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of unsupported and silicon supported polyimide thin (∼1 micron) films. We show how this technique can be used to detect film delaminations and suggest how it may be used to probe film-substrate adhesion quality.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 284: Symposium G – Amorphous Insulating Thin Films , 1992 , 547
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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6. Rogers, J.A., and Nelson, K.A. in preparationGoogle Scholar