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Optical and Structural Characterization of Silicon Microstructures Fabricated by Laser Interference Crystallization

Published online by Cambridge University Press:  15 February 2011

D. Toet ,
G. Aichmayr ,
M. Mulato ,
P. V. Santos ,
A. Spangenberg  and
R. B. Bergmann
D. Toet
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
G. Aichmayr
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
M. Mulato
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
P. V. Santos
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
A. Spangenberg
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
R. B. Bergmann
Affiliation:
Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1,70569 Stuttgart, Germany.
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Abstract

Uniform gratings of sharply defined polycrystalline silicon lines with micrometer-sized periods were created by laser interference crystallization of amorphous silicon. Atomic force microscopy (AFM) reveals that lines fabricated with high pulse energies (380 mJ/cm2) contain large grains (dimensions up to 1.5 μm), growing in a direction perpendicular to the lines. We assign this strong lateral growth to the melting of the material in the center of the lines combined with the presence of small grains, which act as nuclei, at the interfaces with the amorphous regions. Spatially resolved Raman spectroscopy shows that size effects dominate the Raman line shape at the edge of the line, confirming the AFM results, while stress increases towards the center of the line. The spectra measured in the middle of lines created with high energies show doping effects caused by the diffusion of boron atoms from the substrate upon exposure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 467: Symposium A – Amorphous and Microcrystalline Silicon Technology - 1997 , 1997 , 337
Copyright
Copyright © Materials Research Society 1997

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References

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