Hostname: page-component-8448b6f56d-dnltx Total loading time: 0 Render date: 2024-04-24T11:59:18.907Z Has data issue: false hasContentIssue false
  • English
  • Français

Orientation Dependence of Strontium-doped Lead Zirconate Titanate (PSZT) Thin Films on RF Magnetron Sputtering Conditions

Published online by Cambridge University Press:  01 February 2011

Sharath Sriram ,
Madhu Bhaskaran ,
Anthony Stephen Holland  and
Geoffrey K Reeves
Sharath Sriram
Affiliation:
sharath.sriram@gmail.com, RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia, +61390012346
Madhu Bhaskaran
Affiliation:
madhu.bhaskaran@gmail.com, RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
Anthony Stephen Holland
Affiliation:
anthony.holland@rmit.edu.au, RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
Geoffrey K Reeves
Affiliation:
geoff.reeves@rmit.edu.au, RMIT University, Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, GPO Box 2476V, Melbourne, Victoria, 3001, Australia
Get access

Abstract

Studies on strontium-doped lead zirconate titanate (PSZT) have been reported for its high piezoelectric and ferroelectric properties. For PSZT to exhibit pronounced piezoelectric behaviour it must have a crystalline grain structure (perovskite orientation). This paper is a study of the deposition of PSZT thin films by RF magnetron sputtering and the effect of cooling rate, after deposition at temperatures between 500 °C and 700 °C. X-Ray Diffraction (XRD) results are used to show how a cooling rate of 5 °C/min increases the degree of perovskite orientation in sputtered films, when compared to a cooling rate of 15 °C/min. The absence of significant shifts in the positions of diffraction peak patterns in XRD results are used to demonstrate low stress in the deposited films. Atomic Force Microscope (AFM) imaging is used to show the crystalline nature of the PSZT thin films.

Keywords

piezoelectricsputteringx-ray diffraction (XRD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 928: Symposium GG – Current and Future Trends of Functional Oxide Films , 2006 , 0928-GG14-11
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] http://www.morganelectroceramics.com/proptables.pdf, Accessed: March 19, 2005.Google Scholar
[2] Park, J. H., Kwon, T. Y., Yoon, D. S., Kim, H., and Kim, T. S., “Fabrication of Microcantilever Sensors Actuated by Piezoelectric Pb(Zr0.52Ti0.48)O3Thick Films and Determination of Their Electromechanical Characteristics,” Advanced Functional Materials, vol. 15, pp. 2021–2028, 2005.Google Scholar
[3] Maluf, N. and Williams, K., An Introduction to Microelectromechanical Systems Engineering, 2nd ed. Norwood, MA: Artech House Publishers, 2004.Google Scholar
[4] Zheng, H., Reaney, I. M., Lee, W. E., Jones, N., and Thomas, H., “Surface Decomposition of Strontium-doped Soft PbZrO3-PbTiO3 ,” Journal of the American Ceramic Society, vol. 85, no. 1, pp. 207–212, 2002.Google Scholar
[5] Bedoya, C., Muller, C., Baudour, J.-L., Madigou, V., Anne, M., and Roubin, M., “Sr-doped PbZr1-xTixO3 ceramic: Structural Study and Field-induced Reorientation of Ferroelectric Domains,” Materials Science and Engineering B, vol. 75, pp. 43–52, 2000.Google Scholar
[6] Yu, Y., Tu, J., and Singh, R. N., “Phase Stability and Ferroelectric Properties of Lead Strontium Zirconate Titanate Ceramics,” Journal of American Ceramic Society, vol. 84, no. 2, pp. 333–340, 2001.Google Scholar
[7] Araujo, E. B. and Eiras, J. A., “Effects of crystallization conditions on dielectric and ferroelectric properties of PZT thin films,” Journal of Physics D: Applied Physics, vol. 36, pp. 2010–2013, 2003.Google Scholar
[8] Zheng, H., Reaney, I. M., Lee, W. E., Jones, N., and Thomas, H., “Effects of Octahedral Tilting on the Piezoelectric Properties of Strontium/Bariun/Niobium-Doped Soft Lead Zirconate Titanate Ceramics,” Journal of the American Ceramic Society, vol. 85, no. 9, pp. 2337–2344, 2002.Google Scholar
[9] Park, C.-S., Kim, S.-W., Park, G.-T., Choi, J.-J., and Kim, H.-E., “Orientation Control of Lead Zirconate Titanate Film by Combination of Sol-Gel and Sputtering Deposition,” Journal of Material Research, vol. 20, no. 1, pp. 243–246, 2005.Google Scholar
[10] Wasa, K., Kitabatake, M., and Adachi, H., Thin Film Materials Technology: Sputtering of Compound Materials. Heidelberg: Springer-Verlag GmbH & Co. KG, 2004.Google Scholar
[11] Powder Diffraction Pattern File (PDF), JCPDS-ICCD, Swarthmore, PA 19081. At the date this paper was written, the URL referenced herein was deemed to be useful supplementary material to this paper. Neither the author nor the Materials Research Society warrants or assumes liability for the content or availability of the URL referenced in this paper.Google Scholar