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Preparation and Characterization of Metal Alkoxide Derived Epitaxial Lead Titanate Based Thin Films

Published online by Cambridge University Press:  15 February 2011

Keiichi Nashimoto  and
Shigetoshi Nakamura
Keiichi Nashimoto
Affiliation:
Materials Research Laboratory, Fuji Xerox Co., Ltd., 1600 Takematsu, Minamiashigara, Kanagawa, 250–1, Japan
Shigetoshi Nakamura
Affiliation:
Materials Research Laboratory, Fuji Xerox Co., Ltd., 1600 Takematsu, Minamiashigara, Kanagawa, 250–1, Japan
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Abstract

Epitaxial and highly oriented lead titanate based thin films were prepared by a sol-gel process using non-hydrolyzed methoxyethoxide precursors and RTA process. PbTiO3 crystallized with preferred (001) or (100) orientation on SrTiO3 (100) and MgO (100). Solid phase (001) oriented epitaxial growth of PZT on SrTio3 was observed at 425°C, directly from the amorphous phase. That of PZT on MgO was observed at temperatures above 550°C, after the formation of pyrochlore phase. The PZT on SrTiO3 had a single (001) orientation and rocking curve full width at half maximum less than 0.08°. PZT showed a weak preferred (111) orientation on sapphire (0001) substrates, while highly (111) oriented PLT thin films were obtained on them. The guided wave modes were excited by a prism coupling for PZT thin films crystallized on SrTiO3 and MgO. Electrical properties of epitaxial PZT and PLT thin films on Nb-SrTiO3 substrates were characterized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 415
Copyright
Copyright © Materials Research Society 1995

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References

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