Hostname: page-component-76fb5796d-r6qrq Total loading time: 0 Render date: 2024-04-26T00:09:32.815Z Has data issue: false hasContentIssue false
  • English
  • Français

Property Improvement of PLZT Capacitor Using CaRuO3 Top Electrode

Published online by Cambridge University Press:  21 March 2011

Hiroshi Funakubo ,
Noriyuki Higashi  and
Norikazu Okuda
Hiroshi Funakubo
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
Noriyuki Higashi
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
Norikazu Okuda
Affiliation:
Department of Innovative and Engineered Materials, Interdisciplinary Graduate school of Science and Engineering, Tokyo Institute of Technology G1-405, 4259, Nagatsuta-cho, Midori-ku Yokohama, 226-8502, Japan
Get access

Abstract

SrRuO3 and CaRuO3 films prepared by MOCVD were compared not only in term of their own properties but for their characteristics as the top electrodes of (Pb, La)(Zr, Ti)O3[PLZT] capacitor, especially for H2 degradation. Resistivity of CaRuO3 and SrRuO3 films increased after heat treatment in H2-containing atmosphere, but was recovered by a heat treatment at 600 °C under O2 atmosphere. When SrRuO3 and CaRuO3 films deposited at 600 °C were used as top electrodes, the remanent polarization(Pr) value of SrRuO3/PLZT/Pt and CaRuO3/PLZT/Pt capacitors were almost the same as the values for capacitors with a Pt top electrode. After a heat treatment in a 3 % H2 atmosphere at 200 °C, followed by one in O2 atmosphere at 450 °C, Pr value was perfectly recovered for both of SrRuO3 and CaRuO3 films. The leakage current become the smallest when using 50 nm-thick CaRuO3 film as a top electrode. Moreover, no degradation was observed for fatigue test up to 1010 cycles when MOCVD-CaRuO3 films were used as top electrodes. These data show that MOCVD-CaRuO3 film with thin thickness is a useful top electrode for PLZT capacitor.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC4.6.1
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1) Cross, J., Fujiki, M., Tsukada, M., Matsuura, K., Otani, S., Tomotani, M., Kataoka, Y. and Goto, Y., Integ.Ferro., 25, 263–271 (1999).10.1080/10584589908210177Google Scholar
2) Yamamoto, A., Khasanova, N.R., Izumi, F., Wu, X.J., Kamiyama, T., Torii, S. and Tajima, S., Chem, Mater., 11, 11, 747–753 (1999).10.1021/cm980629pGoogle Scholar
3) Okuda, N., Higashi, N., Ishikawa, K., Nukaga, N. and Funakuba, H., Mater. Res. Soc., 596, 79–84(2000).Google Scholar
4) Okuda, N., and Funakukbo, H., Jpn, J. Appl Phys., 39, 572–576(2000).Google Scholar
5) Okusa, N., Matsuzaki, T. and Shinozaki, K., Trans. Mater. Res. Soc. Jpn., 24, 51–54(1999).Google Scholar
6) Higahi, N., Okuda, N. and Funakubo, H., Jps.J.App.Phys., 39, 2780–2783(2000)Google Scholar
7) Okuda, N., Higashi, N., Watanabe, T. and Funakubo, H., Integ.Ferro., in press.Google Scholar