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Quantitative Mapping of Concentrations and Bonding States by Energy Filtering TEM

Published online by Cambridge University Press:  10 February 2011

J. Mayer  and
J. M. Plitzko
J. Mayer
Affiliation:
now at: Central Facility for Electron Microscopy, Aachen University of Technology, D-52056 Aachen, Germany Max-Planck-Institut für Metallforschung, D-70174 Stuttgart, Germany
J. M. Plitzko
Affiliation:
now at: Lawrence Livermore National Laboratory, Livermore, CA 94550 Max-Planck-Institut für Metallforschung, D-70174 Stuttgart, Germany
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Abstract

We have developed new methods to quantify the data acquired by electron spectroscopic imaging (ESI) in an energy filtering TEM. The analysis is based on recording series of energy filtered images across inner-shell loss edges or in the low-loss region. From the series of ESI images, electron energy loss (EEL) spectra can be extracted and subsequently analysed using standard EELS quantification techniques. From an ESI series one can measure the absolute amount (area density) of an element in the given sample area or the concentration ratios of one element with respect to other elements. Spectrum line-profiling has been shown to be an efficient way to acquire and present the information on the chemistry of an interface. The results obtained for different metallisation layer systems show that segregation in the monolayer range can still be analysed with high spatial resolution. For the study of the energy-loss near-edge structure (ELNES) a higher energy resolution is required. ESI series with narrow energy window width can be used to distinguish between different bonding states of a given element and is demonstrated for thin films of diamond and amorphous carbon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 589 , 1999 , 279
Copyright
Copyright © Materials Research Society 2001

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