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Recent Progress in High Power Excimer Laser Development for Producing Next Generation Large-Area Electronic Devices

Published online by Cambridge University Press:  17 March 2011

A. Demin ,
V. Vodchits ,
A. Eltzov ,
O. Kristoforov ,
Yu. Kirukhin ,
A. Vinokhodov ,
V. Borisov ,
R. Osmanov ,
I. Bragin  and
K. Vogler
...Show all authors
A. Demin
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
V. Vodchits
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
A. Eltzov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
O. Kristoforov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
Yu. Kirukhin
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
A. Vinokhodov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
V. Borisov
Affiliation:
State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg., Russia
R. Osmanov
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
I. Bragin
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
K. Vogler
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
U. Rebhan
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
M. Rahe
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
U. Stamm
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
D. Basting
Affiliation:
Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany
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Abstract

This paper reviews the results of the development of high power (up to 1 kW), high energy (up to 10J) prototypes of excimer lasers that are of interest to meet expanding requirements of the electronic industry. Some experimental characteristics are presented for various excimer prototypes operating at the important wavelength of 308nm (XeCl). Keywords: Excimer laser, average power, output energy, annealing

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 685: Symposium D – Advanced Materials and Devices for Large-Area Electronics , 2001 , D7.2.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Sposilli, R.S. and Im, J.S.. Sequential lateral solidification of thin silicon films on SiO2 . Appl.Phys.Lett. 69, pp.2864–2866, 1996 Google Scholar
2. Baranov, V.Y.. Borisov, V.M., Khristoforov, O.B.. Wide aperture electric discharge XeCl laser with UV preionization and 20J output energy. Sov.J.Quantum Electronic, 17, pp.978–983 August.1987 Google Scholar
3. Borisov, V.M., Khristoforov, O.B., Kiryukhin, Yu.B., Kuznetsov, S.G., Stepanov, Yu.Yu., Vinokhodov, A.Yu.. The kilowatt range high repetition rate excimer lasers. Proc. SPIE, 1503, “Excimer Laser and Applications III”, pp. 40–47, 1991 Google Scholar
4. Borisov, V.M., Khristoforov, O.B., Kiryukhin, Yu.B., Vinokhodov, A.Yu., Demin, A.I., Vodchits, V.A., Eltsov, A.V.. Prospects for high power, high repetition rate industrial excimer laser. XIII International Symposium an Gas Flow anm Chemical Lasers and High Power Laserr Conference, Proc. SPIE, 4184, p.348–352., 2000 Google Scholar
5. Baranov, V.Yu., Borisov, V.M., Stepanov, Yu.Yu.. Discharge excimer laser. Energoatomizdat, Moscow, p.241, 1988 Google Scholar
6. Borisov, V.M., Khristoforov, O.B., Kiryukhin, Yu.B., Vinokhodov, A.Yu., Demin, A.I., Vodchits, V.A., Basting, D., Stamm, U., Voss, F., Bragin, I.. High average power excimer laser. Proc.SPIE, 3574, p.56., 1998 Google Scholar
7. Limanov, A.B., Borisov, V.M., Vinokhodov, A.Yu., Demin, A.I., El'tsov, A.I., Kiirukhin, Yu.B., Khristoforov, O.B., Development of Linear Sequential Lateral Solidification Technique to Fabricate Quasi-Single-Crystal Super-Thin Si Films for High-Performance Thin Film Transistor Devices, Perspectives, Science, and Technologies for Novel Silicon on Insulator Devices, 55-61, P.L.F. Hemment et al. © 2000 Kluwer Academic Publishers Google Scholar
8. Limanov, A.B., Chubarenko, V.A., Borisov, V.M., Vinokhodov, A.Yu., Demin, A.I., Khristoforov, O.B., El'tsov, A.V., Kirukhin, Yu.B. Investigation in Si films obtained by SLS technique using of 3 kHz excimer laser with stripped output beam. Russian Microelectronics 28, pp. 25–33, 1999 Google Scholar