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Solid-Phase Epitaxy of Ti-Implanted LiNbO3*

Published online by Cambridge University Press:  25 February 2011

D. B. Poker
D. B. Poker*
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831
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Abstract

The implantation of Ti into LiNbO3 has been studied as a means of altering the optical index of refraction to produce optical waveguides. Implanting 2 × 1017 atoms/cm2 of 360-keV Ti at liquid nitrogen temperature produces a highly damaged region extending to a depth of about 4000 Å. Solid-phase epitaxial regrowth of the LiNbO3 can be achieved by annealing in a water-saturated oxygen atmosphere at 400°C, though complete removal of the residual damage usually requires temperatures in excess of 800°C. The solid-phase epitaxial regrowth rate exhibits an activation energy of 2 eV at doses below 3 × 1016 Ti/cm2, but both the regrowth rate and activation energy decrease at higher doses. At doses above 1 × 1017 Ti/cm2, the solid-phase epitaxial regrowth occurs only at temperatures above 800°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 93: Symposium C – Materials Modification and Growth Using Ion Beams , 1987 , 293
Copyright
Copyright © Materials Research Society 1987

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Footnotes

*

Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract DE-ACO5-840R21400 with Marietta Energy Systems, Inc.

References

REFERENCES

1. Schmidt, R.V. and Kaminow, I.P., Appl. Phys. Lett..25, 458 (1974).Google Scholar
2. Buchal, Ch., Ashley, P.R., Thomas, D.K., and Appleton, B.R., Mat. Res. Soc. Symp. Proc. 88 (in press); Ch. Buchal, P.R. Ashley, and B.R. Appleton, J. Nucl. Mater. (in press).Google Scholar
3. Narayan, J., Holland, O.W., and Appleton, B.R., J. Vac. Sci. Technol. B 1, 871 (1983); J. Narayan, J. Appl. Phys. 53, 8607 (1982).Google Scholar
4. Canali, C., Carnera, A., Celotti, G., Mea, G. Della, and Mazzoldi, P., Mat. Res. Soc. Symp. Proc. 24, 459 (1984).Google Scholar
5. Sweeney, K.L. and Halliburton, L.E., Appl. Phys. Lett. 43, 336 (1983).Google Scholar
6. Metallurgical Thermochemistry, Kubaschewski, O. and Alcock, C.B., (Pergamon Press, New York) 5th edition, 1979.Google Scholar
7. Elam, W.T. and Skeath, P.A., Bull. Am. Phys. Soc. 32, 931 (1987).Google Scholar