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The Structure and the Physical Properties of Si/C Grown by Laser Pyrolysis of Si(CH3)2Cl2

Published online by Cambridge University Press:  25 February 2011

Hua Chang ,
Long Jeng Lee ,
Rong Li Hwang ,
M. S. Lin  and
J. C. Lou
Hua Chang
Affiliation:
Department of Chemistry
Long Jeng Lee
Affiliation:
Department of Chemistry
Rong Li Hwang
Affiliation:
Department of Chemistry
M. S. Lin
Affiliation:
Department of Electric EngineeringNational Tsing Hua University, Hsinchu, Taiwan, Republic of China
J. C. Lou
Affiliation:
Department of Electric EngineeringNational Tsing Hua University, Hsinchu, Taiwan, Republic of China
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Abstract

The chemical kinetics of laser pyrolysis of Si(CH3)2Cl2 was studied. Besides Si/C deposited on substrate as a needle the main gaseous products were H2 and HCI. The decomposition rate constants of Si(CH3)2Cl2 and the formation rate constants of H2 and HCl were measured. The chemical and physical properties of the Si/C needles were studied by various methods, such as their outer features, elemental analysis, Auger depth profile spectra, X-ray diffraction. Other useful properties, such as electric resistivity, photovoltaic effect and hardness, were also reported. A model for the pyrolysis and the growth process of this Si/C needles was proposed. It should be emphasized that the samples with desired physical properties could be grown by controlling the growth conditions properly -- the laser power and the pressure of Si(CH3)2Cl2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 298: Symposium B – Silicon-Based Optoelectronic Materials , 1993 , 241
Copyright
Copyright © Materials Research Society 1993

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