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Study of Surface Structure, Morphology and Hardness of Several Different Diamond-Like Carbon Films

Published online by Cambridge University Press:  21 February 2011

Pearl W. Yip ,
Alex Hsieh  and
Peter G. Dehmer
Pearl W. Yip
Affiliation:
Army Research Laboratory, Watertown, MA 02172–0001
Alex Hsieh
Affiliation:
Army Research Laboratory, Watertown, MA 02172–0001
Peter G. Dehmer
Affiliation:
Army Research Laboratory, Watertown, MA 02172–0001
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Abstract

Diamond-like carbon (DLC) films are noted for their outstanding mechanical hardness, wear resistance, chemical inertness to both acid and alkalis, and high thermal conductivity. Such properties, along with optical transparency over a wide spectral range, make DLC films good candidates for wear-resistant barriers for transparent optics. The objective of this investigation is to compare the DLC films from various commercial sources prepared using different coating technologies, i.e., radio frequency (rf) plasma, ion beam assisted, and laser ablative deposition. Characterization of the DLC films includes scanning electron, scanning Auger, and Atomic Force Microscopy, also Raman and X-ray Photoelectron Spectroscopy. The mechanical properties of these films are evaluated by Taber abrasion, nanoindentation, and ballistic impact tests. In addition, the chemical resistance and environmental stability of these films will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 355: Symposium B1 – Evolution of Thin-Film and Surface Structure and Morphology , 1994 , 401
Copyright
Copyright © Materials Research Society 1995

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References

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