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Surface Analysis Of Lcd Materials iN Various Stages of Production by Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)

Published online by Cambridge University Press:  15 February 2011

J.J. Lee ,
P.M. Lindley  and
R.W. Odom
J.J. Lee
Affiliation:
Charles Evans & Associates, Redwood City, CA 94063
P.M. Lindley
Affiliation:
Charles Evans & Associates, Redwood City, CA 94063
R.W. Odom
Affiliation:
Charles Evans & Associates, Redwood City, CA 94063
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Extract

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a surface analysis technique which provides a sensitive characterization of the elemental and molecular composition of the near-surface region (top few monolayers) of solid materials1. This mass spectrometry technique can also localize the distribution of specific elements, molecules or molecular fragments at submicrometer (µm) lateral resolutions.2

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 345: Symposium M – Flat Panel Display Materials , 1994 , 197
Copyright
Copyright © Materials Research Society 1994

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References

1. Schueler, , Sander, P. and Reed, D.A., Vacuum, 41, 1661(1990).Google Scholar
2. Odom in Microscopic and Spectroscopic Imaging of the Chemical State, Ed. Morris, M.D., Marcel Dekker, New York (1993), Ch. 10.Google Scholar
3. Schueler, , Microsc. Microanal. Microstruct. 3, 1(1992)Google Scholar