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Surface Oxidation Kinetics of an a-Si3 N4 and an Amorphous Si3 N4 Powder

Published online by Cambridge University Press:  25 February 2011

Pu Sen Wang ,
S. G. Malghan ,
S. M. Hsu  and
T. N. Wittberg
Pu Sen Wang
Affiliation:
Ceramics Division, National Institute of Standards and Technology Gaithersburg, MD 20899
S. G. Malghan
Affiliation:
Ceramics Division, National Institute of Standards and Technology Gaithersburg, MD 20899
S. M. Hsu
Affiliation:
Ceramics Division, National Institute of Standards and Technology Gaithersburg, MD 20899
T. N. Wittberg
Affiliation:
University of DaytonResearch Institute Dayton, OH 45469
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Abstract

Surface oxidation kinetics of an a-Si3 N4 submicron size and an amorphous nano-size powder have been studied using x-ray photoelectron spectroscopy (XPS) and Bremsstrahlung-excited Auger electron spectroscopy (AES). The samples were oxidized by heating in air at temperatures between 850°C and 1000°C. The oxide thickness for each heating time and temperature was determined both from the relative 0 Is and N Is XPS peak intensities and from the Si02 and Si3 N4 Si KLL peak intensities. In each case, there was a good agreement between the oxide thickness value calculated from the XPS data and that obtained from the AES data. At these temperatures, oxidation followed a linear rate law. Activation energies of 15±1 kcal/mole and 27±1 kcal/mole were measured for the a-powder and the amorphous powder, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 249: Symposium Q – Synthesis and Processing of Ceramics: Scientific Issues , 1991 , 397
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

[1]. Anon., Research Opportunities for Materials with Ultrafine Microstructures, Report of the Committee on Materials with Submicronsized Microstructures, NMAB-454, National Academy Press, 1989.Google Scholar
[2]. Cannon, W. R., Danforth, S. C., Flint, J. H., Haggerty, J. S. and Marra, R. A., Sinterable Ceramic Powders From Laser-Driven Reactions: I. Process Description and Modelling, J. Am. Cer. Soc., Vol. 65, No. 7, 1981, 324–335.Google Scholar
[3]. Wang, Pu Sen, Hsu, S. M., and Wittberg, T. N., J. Mat. Sci., Vol 26, 1655(1991).Google Scholar
[4]. Wang, P. S., Malghan, S. G., Hsu, S. M., and Wittberg, T. N., in press, Surf. and Interface Analysis.Google Scholar
[5]. Wang, Pu Sen, Hsu, S. M., Malghan, S. G., and Wittberg, T. N., J. Mat. Sci. Vol. 26, 3249 (1991).Google Scholar
[6]. Horton, J. K., J. Am. Cer. Soc., Vol. 52, 121 (1969).Google Scholar
[7]. Tripp, W. C. and Graham, H. C., J. Am. Cer. Soc., Vol. 59, 399 (1976).CrossRefGoogle Scholar
[8]. Wagner, C. D., in “Practical Surface Analysis”, ed. by Briggs, D. and Seah, M. P. (Wiley, NY, 1983) Appendix 4.Google Scholar
[9]. Tanuma, S., Powell, C. J. and Penn, D. R., Surf. and Interface Analysis, Vol. 11, 577 (1988).Google Scholar
[10]. Handbook of Chemistry and Physics, 60th, ed. by Weast, R. C. (Chemical Rubber, Boca Raton, FL 1988), p. B–121.Google Scholar