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Synthesis of Sic Clusters in a Nonthermal Microwave Plasma

Published online by Cambridge University Press:  28 February 2011

A. K. Singh  and
A. L. Kingon
A. K. Singh
Affiliation:
on study leave from Physics Department, Banaras Hindu University Varanasi 221005, India
A. L. Kingon
Affiliation:
Department of Materials Science and Engineering, Ncsu, Raleigh. NC 27695
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Abstract

A new technique has been developed to condense nanoparticles (clusters) of SiC and other nonoxide materials in a nonthermal microwave plasma. The experimental rationale and approach is described. It utilises silane and acetylene precursors in an Ar diluent, with the synthesis carried out in a microwave plasma at a pressure of ∼1 torr. The plasma conditions have been characterised, as have the effect of important parameters (gas ratios, flow rates and pressure) on the product nanoparticles. The resultant nanoparticles have been characterised ex-situ by TEM, Auger, and XPS spectroscopy. SiC particles collected are ∼5nm in size, with cubic, hexagonal and rhombohedral polytypes observed. Silicon nitride has been synthesised similarly by using silane and nitrogen as the precursor gases. Implications of the new technique are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 551
Copyright
Copyright © Materials Research Society 1991

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References

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