La0.7Src.3MnO3 (LSMO) perovskite oxide films have been grown on (001) LaAlO3 (LAO) by pulsed laser deposition. The films were deposited in an ambient oxygen pressure of 0.1 m Torr to 200 mTorr and under different substrate temperatures. Their structural properties were examined by X-ray diffractometry. Heteroepitaxial growth was confirmed for films deposited at 650°C or above. Electrical measurements suggest that the charge carrier concentraticn of the films varies with their oxygen content and shows high stability against further thermal treatment. Semiconducting LSMO films at room temperature were obtained for deposition at oxygen pressure ≤ 60 m Torr. The epitaxial LSMO films have been used as the semiconducting channel of a ferroelectric field effect transistor. Heteroepitaxial Pb(Zr0.52Ti0.48)O3/LSMO/LAO structures have been fabricated and characterized.
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