Hostname: page-component-76fb5796d-dfsvx Total loading time: 0 Render date: 2024-04-26T03:52:45.982Z Has data issue: false hasContentIssue false
  • English
  • Français

Tribological Aspects of AlN-TiN Thin Composite Films

Published online by Cambridge University Press:  01 February 2011

C. Waters ,
G. Young ,
S. Yarmolenko ,
X. Wang  and
J. Sankar
C. Waters
Affiliation:
North Carolina Agricultural and Technical State University, Greensboro, NC 27411, USA
G. Young
Affiliation:
North Carolina Agricultural and Technical State University, Greensboro, NC 27411, USA
S. Yarmolenko
Affiliation:
North Carolina Agricultural and Technical State University, Greensboro, NC 27411, USA
X. Wang
Affiliation:
North Carolina Agricultural and Technical State University, Greensboro, NC 27411, USA
J. Sankar
Affiliation:
North Carolina Agricultural and Technical State University, Greensboro, NC 27411, USA
Get access

Abstract

Physical properties, and the friction and wear are important issues in small-scale applications, it is therefore essential that the materials used have good micromechanical and tribological properties. The adhesion, fracture toughness and wear properties of AlN-TiN thin composite films is being investigated in this study. The multilayered structures are generated using Pulsed Laser Deposition (PLD). The durability and functionality of thin films is subject to the adhesion between the coating and the underlying substrate in addition to it's resistance to cracking. The magnitude of the critical load during a scratch test is related to the adhesion of the substrate to the coating. In this test a Berkovich indenter is used for measurements and is drawn across the surface of a coating under an increasing load. The magnitude of the critical load will be studied for various films from a monolayer TiN film to different AlN-TiN films and those relative results compared to their facture toughness and their wear properties. Despite the adhesion, the critical load depends on several other parameters including the friction coefficient. The critical characteristic load is shown to depend on the number of layers and the relative AlN-TiN thickness. The fracture toughness showed a weak dependence on the layer characteristics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 843: Symposium T – Surface Engineering-Fundamentals and Applications , 2004 , T3.40
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Williams, J.A., Tribology International, Vol. 29, No. 8, (1996) 675–695.Google Scholar
[2] Waters, C., Kumar, D., Yarmolenko, S., Xu, Z. and Sankar, J., Wang, X., MRS presentation, Fall 2003.Google Scholar
[3] McAdams, S.D., Tsui, T.Y., Oliver, W.C., Pharr, G.M., “Effects of interlayers on the scratch adhesion performance of ultra-thin films of copper and gold on silicon substrates”, Thin Films: Stresses and Mechanical Properties V, vol. 356, Materials Research Society, Pittsburgh, PA, 1995, pp. 809–814.Google Scholar
[4] Bhushan, B., Gupta, B.K., Azarian, M.H., Wear 181–183 (1995) 743–758.Google Scholar
[5] Li, X., Bhushan, B., Thin Solid Films 398–399 (2001) 313–319.Google Scholar
[6] Cook, R.F., Morris, D.J., Thurn, J, Mat.Res.Soc.Symp.Proc., vol. 795, U4.1, (Fall 2003) 1.Google Scholar