Skip to main content
×
×
Home

Ultrasonic spray assisted Mist-CVD method for high-quality crystalline and amorphous oxide semiconductors growth

  • Hiroyuki Nishinaka (a1), Yudai Kamada (a1), Keiji Kiba (a1), Naoki Kameyama (a1) and Shizuo Fujita (a1)...
Abstract
ABSTRACT

The growth of high-quality crystalline ZnO thin films on ZnO bulk substrates and of amorphous In-Ga-O and Ga-Al-O thin films has been demonstrated by using the solution-based cost-effective and environmental friendly ultrasonic spray assisted mist-CVD method. The homoepitaxial ZnO thin films with atomically flat surfaces were successfully grown on Zn-polar ZnO substrates via a step-flow growth mode, in spite of different miscut angles of the substrate, at the furnace temperature of 1000°C. The compositions and optical absorption edges of the amorphous In-Ga-O and Ga-Al-O thin films were controlled by means of the concentration ratios of [In]/([In]+[Ga]) and [Al]/([Al]+[Ga]) in the starting solutions.

Copyright
References
Hide All
1.Tsukazaki A., Ohtomo A., Onuma T., Ohtani M., Makino T., Sumiya M., Ohtani K., Chichibu S. F., Fuke S., Segawa Y., Ohno H., Koinuma H., and Kawasaki M., Nature Mater. 4, 42 (2005).
2.Ryu Y. R., Lubguban J. A., Lee T. S., White H. W., Jeong T.S., Youn C. J., and Kim B. J., Appl. Phys. Lett. 90, 131115 (2007).
3.Iwata K., Sakemi T., Yamada A., Fons P., Awai K., Yamamoto T., Matsubara M., Tampo H., and Niki S., Thin Solid Films 445, 274 (2003).
4.Nomura K., Ohta H., Takagi A., Kamiya T., Hirano M., and Hosono H., Nature 432, 488 (2004).
5.Nishinaka H. and Fujita S., J. Cryst. Growth 310, 5007 (2008).
6.Shinohara D. and Fujita S., Jpn. J. Appl. Phys. 47, 7311 (2008).
7.Nishinaka H., Kawaharamura T., and Fujita S., J. Korean Phys. Soc. 53, 3025 (2008).
8.Nishinaka H., Kawaharamura T., and Fujita S., Jpn. J. Appl. Phys. 46, 6811 (2007).
9.Kawaharamura T., Nishinaka H., Kamada Y., Masuda Y., Lu J.-G., and Fujita S., J. Korean Phys. Soc. 53, 2976 (2008).
10.Nakahara K., Tanabe T., Takasu H., Fons P., Iwata K., Yamada A., Matsubara K., Hunger R., and Niki S., Jpn. J. Appl. Phys. 40, 250 (2001).
11.Miyamoto K., Sano M., Kato H., and Yao T., J. Cryst. Growth 265, 34 (2004).
12.Ito M., Kon M., Miyazaki C., Ikeda N., Ishizaki M., Matsubara R., Ugajin Y., and Sekine N., phys. Stat. sol. (a) 205, 1885 (2008).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 7 *
Loading metrics...

Abstract views

Total abstract views: 128 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 23rd January 2018. This data will be updated every 24 hours.