Hostname: page-component-848d4c4894-75dct Total loading time: 0 Render date: 2024-05-17T02:46:01.992Z Has data issue: false hasContentIssue false
  • English
  • Français

XPS Study of the Interface of Polyimide on Cr And Ni.

Published online by Cambridge University Press:  21 February 2011

Marco Garilli ,
Giovanni Marletta ,
Orazio Puglisi ,
Carmelo Oliveri ,
Carmelo Magro  and
Giuseppe Ferla
Marco Garilli
Affiliation:
Consorzio Catania-Ricerche, Viale A.Doria 8, Catania (ITALY)
Giovanni Marletta
Affiliation:
Dipartimento di Scienze Chimiche, v.A.Doria 6, Catania, ITALY
Orazio Puglisi
Affiliation:
Dipartimento di Scienze Chimiche, v.A.Doria 6, Catania, ITALY
Carmelo Oliveri
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania (ITALY)
Carmelo Magro
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania (ITALY)
Giuseppe Ferla
Affiliation:
ST Microelectronics, Stradale Primosole 50, Catania (ITALY)
Get access

Abstract

The paper presents a study of three polyimide-oxide interfaces. The Cr-oxide-PI interface seems to undergo a drastic topographical structural rearrangement. The case of the Ni surface is indicative of heavy decomposition of the Ni oxide which induces the decomposition of the polymer film. On the contrary the stabilized Ni surface behaves in a normal manner indicating that the driving force for the decomposition is the instability of the oxide.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 317
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1) “Polyimides:synthesis, characterization and applications”, Mittal, K.L. Ed.,Plenum Press,N.Y. 1984.Google Scholar
2) Grunze, M.,Unertl, W.N.,Gnanarajan, S. and French, S., in “Electronic Packaging Material Science III”; Jaccodine, R.,Jackson, K.A., Sundhal, R.C. Eds.;MRS,Pittsburgh 1988, p.189.Google Scholar
3) Chou, N.J. and Tang, C.H.,J.Vacuum Sci.Technol. A, 2(1984)751.Google Scholar
4) Ohuchi, F.S. and Freilich, S.C.,J.Vacuum Sci.Technol. A, 4 (1986)1039.Google Scholar
5) Nardo, N.J. Di,Demuth, J.E. and Clark, T.C.,J.Vacuum Sci.Technol. A, 4(1986)1050.Google Scholar
6) Russat, J.,Surf.Interf.Anal., 11(1988)414.Google Scholar
7) Grunze, M. and Lamb, R.N.,Chem.Phys.Letters, 133(1987)283.Google Scholar
8) Narechania, R.G.,Bruce, J.A. and Fridmann, S.A., J.Electrochem. Soc., 132(1985)2700.Google Scholar
9) Buchwalter, L.P. and Greenblatt, J., J.Adhes.,19(1984)257.Google Scholar
10) Proctor, A. and Sherwood, P.M.A., Anal.Chem., 54 (1982) 13.Google Scholar
11) Endo, A. and Yada, T., J.Electrochem.Soc., 132(1985)155.Google Scholar
12) Cochran, S.J. and Larkins, F.P., J.Chem.Soc.Faraday Trans.I, 81(1985)2179 and references therein.Google Scholar
13) Leary, H.J. and Campbell, D.S.,Surf.Interf.Analysis, 1(1979)75.Google Scholar
14) Buchwalter, P.L. and Baise, A.I., in Polyimides, Synthesis, characterization and applications, ed.by Mittal, K.L.(Plenum, New York, 1984)Vol.1,p.537.Google Scholar