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A global assessment of piezoelectric actuated micro-pumps

Published online by Cambridge University Press:  07 July 2010

C. Hernandez ,
Y. Bernard  and
A. Razek
C. Hernandez*
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
Y. Bernard
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
A. Razek
Affiliation:
Laboratoire de Génie Électrique de Paris (LGEP)/SPEE-Labs, SUPELEC, Univ. Paris-Sud, Univ. Pierre et Marie Curie Paris 6, CNRS (UMR 8507), 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France
*
camilo.hernandez@lgep.supelec.fr
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Abstract

This article provides an extensive outlook of different types of piezoelectric actuated micro-pumps published in the literature recently. We start by reminding the reader about the conventional operating parameters used to quantify the capabilities of these devices. After this introductory stage, we describe and classify the most prominent micro-pump's geometries found with piezoelectric actuation. At this point we identify the parameters given previously for each pump in order to establish a subsequent discussion in which the trends of different families are compared. Specific attention is given to the particularities of each case namely: flow rates and backpressures.

Type
Review Article
Information
The European Physical Journal - Applied Physics , Volume 51 , Issue 2 , August 2010 , 20101
Copyright
© EDP Sciences, 2010

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