Hostname: page-component-848d4c4894-2pzkn Total loading time: 0 Render date: 2024-05-21T05:26:07.568Z Has data issue: false hasContentIssue false
  • English
  • Français

Analysis of particulates generated in a radiofrequencymethane plasma by laser light scattering and optical spectroscopy

Published online by Cambridge University Press:  15 October 1999

I. Géraud-Grenier ,
V. Massereau-Guilbaud  and
A. Plain
I. Géraud-Grenier*
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
V. Massereau-Guilbaud
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
A. Plain
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, site de Bourges, rue G. Berger, B.P. 4043, 18028 Bourges Cedex, France
*
Isabelle.Geraud@bourges.univ-orleans.fr
Get access

Abstract

The generation and the behavior of amorphous hydrogenated carbon particulates have been investigated in a pure methane low pressure radiofrequency discharge at 13.56 MHz. In the plasma, the formation and the presence of two kinds of particulates have been evidenced by use of laser light scattering. The study of the different forces acting on the particulates allowed us to understand their behavior in the discharge. Optical emission measurements have enabled us to correlate the evolutions of the emission lines (CH, Hα and H2) with the growth of amorphous hydrogenated carbon particulates and also with the results obtained by laser light scattering. The particulate sizes have been measured and a particulate number density of about 3.0 × 106 cm−3 has been determined.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 8 , Issue 1 , October 1999 , pp. 53 - 59
Copyright
© EDP Sciences, 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Selwin, G.S., Singh, J., Benett, R.S., J. Vac. Sci. Technol. A 7, 2758 (1989).
Selwin, G.S., McKillop, J.S., Haller, K.L., Wu, J.J., J. Vac. Sci. Technol. A 8, 1726 (1990).
Jellum, G.M., Graves, D.B., J. Appl. Phys. 67, 6490 (1990). CrossRef
Smadi, M.M., Kong, G.Y., Carlile, R.N., Beck, S.E., J. Vac. Sci. Tech. B 10, 30 (1992). CrossRef
Allard, L.F., Voelkl, E., Kalakkad, D.S., Datye, A.K., J. Mat. Sci. 29, 5612 (1994). CrossRef
Saito, Y., Matsuda, M., Jpn J. Appl. Phys. 34, 5594 (1995). CrossRef
L. Spitzer, Physical Processes in the interstellar Medium (Wiley, New-York, 1978).
Khare, B.N., Thompson, W.R., Cheng, L., Chyba, C., Sagan, C., Arakawa, E.T., Meisse, C., Tuminello, P.S., Icarus 103, 290 (1993). CrossRef
Plasma Sources Sci. Technol. 3, No. 3 (1994), Proceedings of the NATO Advanced Research, Worshop on Particles in Plasma.
Bouchoule, A., Plain, A., Boufendi, L., Blondeau, J.Ph., Laure, C., J. Appl. Phys. 70, 1991 (1991). CrossRef
Watanabe, Y., Shiratani, M., Kawasaki, H., Singh, S., Fukuzawa, T., Ueda, Y., Ohkura, H., J. Vac. Sci. Technol. A 14, 540 (1996). CrossRef
Praburam, G., Goree, J., J. Vac. Sci. Technol. A 12, 3137 (1994). CrossRef
Hayashi, Y., Tachibana, K., Jpn J. Appl. Phys. 33, 4208 (1994). CrossRef
Jellum, G.M., Daugherty, J.E., Graves, D.B., J. Appl. Phys. 69, 6923 (1991). CrossRef
Perrin, J., Molinas-Mata, P., Belenguer, P., J. Phys. D. Appl. Phys. 27, 2499 (1994). CrossRef
A. Merad, Ph.D. thesis, University of Toulouse, France, 1998.
A. Rhallabi, Ph.D. thesis, University of Nantes, France, 1992.
Seeböck, R.J., Böhme, W., Köhler, W.E., Römheld, M., Veprek, S., Plasma Sources Sci. Technol. 3, 359 (1994).
Talbot, L., Cheng, R.K., Schefer, R.W., Willis, D.R., J. Fluid. Mech. 101, 737 (1980). CrossRef
Boufendi, L., Bouchoule, A., Porteous, R.K., Blondeau, J.Ph., Plain, A., Laure, C., J. Appl. Phys. 673, 2160 (1993). CrossRef
Th. Trottenberg, A. Melzer, A. Piel, Plasma Sources Sci. Technol. 4, 450 (1995). CrossRef
Tachibana, K., Mukai, T., Yuuki, A., Matsui, Y., Harima, H., Jpn J. Appl. Phys. 29, 2156 (1990). CrossRef
Ph. Belenguer, J.Ph. Blondeau, L. Boufendi, M. Toogood, A. Plain, A. Bouchoule, C. Laure, Phys. Rev. A 46, 7923 (1992). CrossRef
Clay, K.J., Speakman, S.P., Amaratunga, G.A.J., Silva, S.R.P., J. Appl. Phys. 79, 7227 (1996). CrossRef
Boeuf, J.P., Phys. Rev. A 46, 7910 (1992). CrossRef
Watanabe, Y., Shiratani, M., Fukuzawa, T., Kawasaki, H., Plasma Sources Sci. Technol. 3, 355 (1994). CrossRef
Mantzaris, N.V., Gogolides, E., Boudouvis, A.G., Rhallabi, A., Turban, G., J. Appl. Phys. 79, 3718 (1996). CrossRef
C.F. Bohren, D.R. Hauffman, Absorption and Scattering of Light by Small Particles (Wiley, New-York, 1983).
Dorier, J.L., Hollenstein, Ch., Howling, A.A., J. Vac. Sci. Technol. A 13, 918 (1994). CrossRef