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LM-STEM Study of Dislocations in Thick Silicon

Published online by Cambridge University Press:  26 July 2009

D Tang ,
A Rucki ,
H Cerva  and
P Schlossmacher
D Tang
Affiliation:
FEI Company,Netherlands
A Rucki
Affiliation:
Siemens AG,Germany
H Cerva
Affiliation:
Siemens AG,Germany
P Schlossmacher
Affiliation:
FEI Company,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 190 - 191
Copyright
Copyright © Microscopy Society of America 2009