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Nonequilibrium Structures in Codeposited Cr-Fe-Ni Films

Published online by Cambridge University Press:  01 February 2011

E.D. Specht
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831–6118, USA
P.D. Rack
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831–6118, USA
A. Rar
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831–6118, USA Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee, 37996, USA
G.M. Pharr
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831–6118, USA Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee, 37996, USA
E.P. George
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831–6118, USA Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee, 37996, USA
H. Hong
Affiliation:
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, 61801, USA
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Abstract

Ternary libraries are prepared by codeposition of Cr, Fe, and Ni on single-crystal Si and Al2O3 (sapphire) substrates at ∼100°C. The varying proximity to the three metal sources produces a spread of compositions in the films, which are analyzed both as-deposited and after annealing in vacuum for 2 h at 500°C. Structural maps are produced using synchrotron radiation and simultaneous detection of 2D diffraction patterns and x-ray fluorescence spectra. Four phases are identified in the as-deposited films. Three phases occur in equilibrium: bcc (α), fcc (γ), and intermetallic (σ). The fourth phase does not correspond to any equilibrium phase in the Cr-Fe-Ni system; it is tentatively identified as isomorphic to the α-Mn (A12) structure. After annealing, the nonequilibrium phase is no longer observed, but the occurrence of the three equilibrium phases is still far from the equilibrium phase boundaries. The particle size measured by x rays is small (9–15 nm), suggesting that higher annealing temperatures are required for the growth of equilibrium phases.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

[1] Levin, A.A., Meyer, D.C., Tselev, A., Gorbunov, A., Pompe, W., and Paufler, P., J. Alloys Compd. 334, 159166 (2002).Google Scholar
[2] Simmonds, M.C., Newman, R.C., Fujimoto, S., and Colligon, J.S., Thin Solid Films 279, 46 (1996).Google Scholar
[3] Kuzmann, E., Principi, G., Tosello, C., Havancsák, K., Stichleutener, S., Geröcs, I., Homannay, Z., and Vértes, A., Nucl. Instrum. Methods Phys. Res., Sect. B 183, 425431 (2001).Google Scholar
[4] Specht, E. D., Rar, A., Pharr, G.M., George, E.P., Zschack, P., Hong, H., and Ilavsky, J., J. Mater. Res. 10, 25222527 (2003).Google Scholar
[5] Chuang, Y.-Y. and Chang, Y.Y., Metall. Trans. A 18, 733745 (1987).Google Scholar
[6] Oberteuffer, J.A. and Ibers, J.A., Acta Crystallogr., Sect. B: Struct. Sci. 26, 14991504 (1970).Google Scholar
[7] Williamson, G.K. and Hall, W.H., Acta Met. 1, 2231 (1953).Google Scholar
[8] Wetmore, F.E.W. and LeRoy, D.J., Principles of Phase Equilibria. (McGraw-Hill, New York, 1951).Google Scholar