Hostname: page-component-76fb5796d-wq484 Total loading time: 0 Render date: 2024-04-26T05:46:15.692Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Application of Electronic Oxides for Solar Energy

Published online by Cambridge University Press:  01 February 2011

James M. Kestner ,
Anna Chorney ,
Joshua J. Robbins ,
Yen-jung Huang ,
Tyrone L. Vincent ,
Colin A. Wolden  and
Lawrence M. Woods
James M. Kestner
Affiliation:
Department of Chemical Engineering and Division of Engineering
Anna Chorney
Affiliation:
Department of Chemical Engineering and Division of Engineering
Joshua J. Robbins
Affiliation:
Department of Chemical Engineering and Division of Engineering
Yen-jung Huang
Affiliation:
Department of Chemical Engineering and Division of Engineering
Tyrone L. Vincent
Affiliation:
Colorado School of Mines, Golden, CO 80401-1887, USA.
Colin A. Wolden
Affiliation:
Department of Chemical Engineering and Division of Engineering
Lawrence M. Woods
Affiliation:
ITN Energy Systems, Inc., Littleton, CO 80545, USA
Get access

Abstract

Plasma-enhanced chemical vapor deposition (PECVD) is being developed as a flexible coating technology for a variety of oxides. In this paper we discuss the synthesis of transparent conducting oxides (TCOs), insulating oxides and electrochromic oxides. Tin oxide was synthesized using mixtures of SnCl4 and O2. By proper control of processing conditions the resistivity of this material may be varied from 10-3 < ρ < 105 Ω-cm. Films of varying resistivity were employed as buffer layers in CdS/CdTe solar cells. Preliminary device results have demonstrated that integration of a tin oxide buffer layer was very beneficial for cell performance. In addition, we demonstrate the PECVD synthesis of WO3 from WF6/O2/H2/Ar mixtures. The plasma process space that yielded adherent, transparent tungsten oxide was established. The deposited films were both amorphous and reversibly electrochromic. High temperature annealing above 400°C converted the films into a polycrystalline state.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 730: Symposium V – Materials for Energy Storage, Generation, and Transport , 2002 , V3.2
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Robbins, J. J., Alexander, R. T., Bai, M., Huang, Y.-J., Vincent, T. L., and Wolden, C. A., J. Vac. Sci. Technol. A, 19 2762 (2001).Google Scholar
2. Robbins, J. J., Alexander, R. T., Xiao, W., Vincent, T. L. and Wolden, C. A., Thin Solid Films, (2002) (in press).Google Scholar
3. Wu, X., X., Sheldon, P., Mahathongdy, Y., Ribelin, R., Mason, A., Moutinho, H. R., and Coutts, T. J., in NCPV Photovoltaics Program Review, edited by Al-Jassim, M., Thorton, J. P., and Gee, J. M., (American Institute of Physics CP462, Woodbury, NY, 1999) pp. 37–41.Google Scholar
4. Li, X., Ribelin, R., Mahathongdy, Y., Albin, D., Dhere, R., Rose, D., Asher, S., Moutinho, H., and Sheldon, P., in NCPV Photovoltaics Program Review, edited by Al-Jassim, M., Thorton, J. P., and Gee, J. M., (American Institute of Physics CP462, Woodbury, NY, 1999) pp. 230–235.Google Scholar
5. Mathew, J. G. H., S.P.S., Cumbo, M. J., O'Brien, N. A., Sargent, R. B., Raksha, V. P., Lahaderne, R. B., and Hichwa, B. P., J. Non-Cryst. Solids, 218 342 (1997).Google Scholar
6. Kestner, J. M., Wolden, C. A., Meyers, P. V., Raja, L. L., and Kee, R. J., in Proceedings of the 28th IEEE Photovoltaic Specialists Conference (Piscataway, NJ, 2000) pp. 595–598.Google Scholar
7. Robbins, J. J., Huang, Y.-J., Bai, M., Vincent, T. L., and Wolden, C. A., Mater. Res. Soc. Symp. Proc. 666 F1.7 (2001).Google Scholar
8. Mahathongdy, Y., Albin, D. S., Wolden, C. A., and Baldwin, R. B., in NCPV Photovoltaics Program Review, edited by Al-Jassim, M., Thorton, J. P., and Gee, J. M., (American Institute of Physics CP462, Woodbury, NY, 1999) pp. 236–241.Google Scholar
9. Tracy, C. E. and Benson, D. K., J. Vac. Sci. Technol. A 4 2377 (1986).Google Scholar
10. Henley, W. B. and Sacks, G. J., J. Electrochem. Soc. 144 1045 (1997).Google Scholar
11. Crandall, R. S. and Faughan, B. W., Appl. Phys. Lett. 26 120 (1975).Google Scholar