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Fluorine Doping of Pyrogenic Silica

Published online by Cambridge University Press:  25 February 2011

T. J. Miller ,
D. A. Nicol ,
K. D. Pohl  and
H. R. Clark
T. J. Miller
Affiliation:
AT&T Laboratories, Princeton, New Jersey 08540
D. A. Nicol
Affiliation:
AT&T Laboratories, Princeton, New Jersey 08540
K. D. Pohl
Affiliation:
AT&T Laboratories, Princeton, New Jersey 08540
H. R. Clark
Affiliation:
AT&T Laboratories, Princeton, New Jersey 08540
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Abstract

The incorporation of atomic fluorine into flame synthesized silica boules has been investigated. Soot boules were doped with fluorine using three different methods: (A) in a low temperature process, using XeF2 as the fluorinating agent prior to consolidation, (B) utilizing SiF4 or SF6 in the reagent gas mix during the combustion synthesis and soot deposition step and (C) in situ treatment with SF6 during the dehydration/ consolidation step at elevated temperatures. All three methods produced uniformly down-doped glass after consolidation, although the maximum fluorine incorporation and level of down-doping for each method followed A <B <C. Fluorine incorporation mechanisms are proposed for each method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 88: Symposium P – Optical Fiber Materials and Properties , 1986 , 43
Copyright
Copyright © Materials Research Society 1987

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References

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