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Roles of Impurities and Implantation Depth on He+- Cavity Shape in Silicon

Published online by Cambridge University Press:  01 February 2011

Gabrielle Regula ,
Rachid El Bouayadi ,
Maryse Lancin ,
Esidor Ntsoenzok ,
Bernard Pichaud  and
Marie-Odile Ruault
Gabrielle Regula
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
Rachid El Bouayadi
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
Maryse Lancin
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
Esidor Ntsoenzok
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
Bernard Pichaud
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
Marie-Odile Ruault
Affiliation:
Laboratoire TECSEN CNRS UMR-6122, Aix-Marseille III, Service 151, Marseille, F-13397
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Abstract

Silicon samples were implanted with He+ ions at energies varying from 10keV to 1.55MeV using doses ranging from 1.45×1016 cm-2 to 5×1016cm-2 to obtain similar He concentration at each projection range (Rp). In few samples, gold, platinum, nickel or silver was introduced prior to He+ implantation by diffusion at temperatures ranging from 870°C to 1050°C. All samples were annealed in the 400°C–1050°C temperature range to determine the equilibrium stage of the growth of the cavity. The cavity characteristics (distribution, shape and size) were studied by cross section transmission electron microscopy (XTEM). Their morphology demonstrates the validity of the chemisorption hypothesis when they grow in silicon intentionally contaminated by metal. A consequence of the surface proximity on the cavity characteristics was verified and allows stepping forward two regimes of cavity growth: one, very fast, taking place in a He-free environment and another one, slower, occurring in a He-rich atmosphere.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 864: Symposium E – Semiconductor Defect Engineering-Materials, Synthesis Structures and Devices , 2005 , E7.5
Copyright
Copyright © Materials Research Society 2005

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