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Single-Source Precursors to Vanadium Nitride Thin Films

Published online by Cambridge University Press:  22 February 2011

Charles H. Winter ,
Valerie C. Viejo  and
James W. Proscia
Charles H. Winter
Affiliation:
Department of Chemistry, Wayne State University, Detroit, MI 48202
Valerie C. Viejo
Affiliation:
Department of Chemistry, Wayne State University, Detroit, MI 48202
James W. Proscia
Affiliation:
Ford Motor Company, Glass Division, Dearborn, MI 48120
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Abstract

Vanadium nitride films reflect infrared radiation and are candidates for solar control coatings for glass. Herein we report our efforts to prepare new precursors to vanadium nitride coatings. Treatment of vanadium tetrachloride with primary alkylamines in dichloromethane affords vanadium chloride amides of the empirical formula [VCI2(NHR)2(NH2R)2]. The characterization and properties of these compounds is presented. The complexes [VC12(NHR)2(NH2R)2] can be sublimed at ca. 100°C (0.1 mmHg) and serve as single-source precursors to vanadium carbonitride films. Films have been deposited in the temperature range of 400-600°C on glass and silicon substrates. The film properties and characterization will be overviewed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 327: Symposium N – Covalent Ceramics II: Non-Oxides , 1993 , 109
Copyright
Copyright © Materials Research Society 1994

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References

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