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Formation of Metastable Structures and Amorphous Phases in cu-w Alloys Using the Triode Sputtering Technique

Published online by Cambridge University Press:  26 February 2011

H. F. Rizzo ,
L. E. Tanner ,
M. A. Wall ,
T. B. Massalski  and
E. D. McClanahan
H. F. Rizzo
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
L. E. Tanner
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
M. A. Wall
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
T. B. Massalski
Affiliation:
Carnegie-Mellon University, Pittsburgh, PA 15213
E. D. McClanahan
Affiliation:
Pacific Northwest Laboratory, Richland, WA 99352
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Abstract

The triode sputtering technique and a “split-target” arrangement were used to produce metastable crystalline and amorphous phases in the Cu-W system under essentially oxygen-free conditions. Large metastable extensions of solid solubility were observed both from the Cu (fcc) and W (bcc) sides of the phase diagram, and a wide range of metallic glass formation was observed, approximately between 30 and 65 at.% W. The thickness of the amorphous Cu-W phase (40–160 pm) that can be deposited without the formation of the metastable bcc phase appears to be dependent on the Cu-W alloy composition. On heating, the crystallization temperature of the amorphous alloys was higher than 350°C. The behavior of the lattice parameter and near-neighbor distance has been studied with x-ray diffraction, showing small positive deviations from an assumed Vegard's Law. Hardness measurements indicate that the metastable crystalline phases are relatively harder than the amorphous phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 81
Copyright
Copyright © Materials Research Society 1988

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References

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