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Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique

Published online by Cambridge University Press:  12 January 2012

Linzi E. Dodd ,
Andrew J. Gallant  and
David Wood
Linzi E. Dodd
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
Andrew J. Gallant
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
David Wood
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
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Abstract

This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.

Keywords

electrical propertiesoxidemicrostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1415: Symposium HH/II/TT – MEMS, BioMEMS and Bioelectronics–Materials and Devices , 2012 , mrsf11-1415-tt04-06
Copyright
Copyright © Materials Research Society 2012

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References

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