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Principles and Performance of a PC-Based Program for Simulation of Grazing Incidence X-Ray Reflectivity Profiles

Published online by Cambridge University Press:  25 February 2011

M. Wormington
Affiliation:
Bede Scientific Software Division, University of Warwick Science Park, Coventry, CV4 7EZ UK and Department of Engineering, University of Warwick, Coventry, CV4 7AL, UK
D. K. Bowen
Affiliation:
Bede Scientific Software Division, University of Warwick Science Park, Coventry, CV4 7EZ UK and Department of Engineering, University of Warwick, Coventry, CV4 7AL, UK
B. K. Tanner
Affiliation:
Bede Scientific Software Division, University of Warwick Science Park, Coventry, CV4 7EZ UK and Department of Engineering, University of Warwick, Coventry, CV4 7AL, UK
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Abstract

We describe PC- based software which calculates grazing incidence X-ray reflectivity profiles from model thin film structures, including interface grading. We discuss the mathematical principles of the model and benchmark tests for speed of operation on two PC compatible machines are presented. Curvature of the specimen results in selective loss of fringe visibility at low scattering vectors and is treated rigorously. We discuss the treatment of roughness and use a generalized formula that is valid at large and small values of the reflectivity; its effects are illustrated using the program.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

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