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An Investigation of Film Thickness Effect on Mechanical Properties of Au Films Using Nanoindentation Techniques

Published online by Cambridge University Press:  01 February 2011

Yifang Cao ,
Zong Zong  and
Wole Soboyejo
Yifang Cao
Affiliation:
Princeton Institute of Materials Science and Engineering(PRISM) and Department of Mechanical and Aerospace Engineering Princeton University Princeton, NJ 08544
Zong Zong
Affiliation:
Princeton Institute of Materials Science and Engineering(PRISM) and Department of Mechanical and Aerospace Engineering Princeton University Princeton, NJ 08544
Wole Soboyejo
Affiliation:
Princeton Institute of Materials Science and Engineering(PRISM) and Department of Mechanical and Aerospace Engineering Princeton University Princeton, NJ 08544
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Abstract

This paper presents the results of nanoindentation experimental studies of Au thin films with different thicknesses. The effects of film thickness and microstructure on the hardnesses of electron-beam deposited Au films were studied in terms of Hall-Petch relationship. The effects of different thicknesses on indentation size effects (ISE) are explained within the framework of mechanism-based strain gradient (MSG) theory using the concept of microstructural length scale.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O5.6
Copyright
Copyright © Materials Research Society 2005

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